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专利 已注册

CONTROL SYSTEM FOR DOUBLE-SIDE POLISHING APPARATUS, CONTROL APPARATUS, AND METHOD FOR PRODUCING SUBSTRATE

Overview

ໜ້ານີ້ສະຫຼຸບ ສິດທິບັດ «CONTROL SYSTEM FOR DOUBLE-SIDE POLISHING APPARATUS, CONTROL APPARATUS, AND METHOD FOR PRODUCING SUBSTRATE» ຈາກຂໍ້ມູນຈົດທະບຽນເປີດ, ຍື່ນໂດຍ TOYO KOHAN CO., LTD ໃນວັນທີ 2020-07-03; ສະຖານະ ຈົດທະບຽນແລ້ວ. ຕົວລະບຸ: ເລກທີຄຳຮ້ອງ P/818; ລະຫັດ DIP LAP818; ປະເພດການປົກປ້ອງ Patent - PCT National Phase. ວັນທີສຳຄັນ: ວັນເຜີຍແຜ່ 2025-12-19; ວັນຈົດທະບຽນ/ອະນຸຍາດ 2025-04-25; ວັນໝົດອາຍຸ 2040-07-03. ປະເພດ/ຫ້ອງ: B24B 37/08、B24B 49/10、B24B 49/16、H01L 21/304. ນັກປະດິດ/ນັກອອກແບບ: FUJII Hirofumi, KITAMOTO Hideo, SHIOMICHI Yukimasa, SUGIMURA OsaMU. ສະຫຼຸບ: The present invention addresses the problem of providing a control system of a double-sided polishing device, a control device, and a metho…. ຂໍ້ມູນເພື່ອອ້າງອີງເທົ່ານັ້ນ ບໍ່ແມ່ນຄຳແນະນຳທາງກົດໝາຍ ຫຼື ໃບຢັ້ງຢືນສິດ.

专利 老挝 DIP

申请号 P/818
申请日期 2020-07-03
注册/授权日 2025-04-25
申请人 TOYO KOHAN CO., LTD
代理机构 Tilleke & Gibbins Lao Co., Ltd
类别 B24B 37/08 · B24B 49/10 · B24B 49/16 · H01L 21/304

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基础信息

类型
专利
申请号
P/818
状态
已注册
申请人
TOYO KOHAN CO., LTD
代理机构
Tilleke & Gibbins Lao Co., Ltd
申请日期
2020-07-03
注册号
P/818
公开/公告日
2025-12-19
注册/授权日
2025-04-25
届满日
2040-07-03
国际分类
B24B 37/08 · B24B 49/10 · B24B 49/16 · H01L 21/304
商品 / 服务
—

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ສູດເປໂຣໄຊ້ ພ້ອມຄຸນສົມບັດຕ້ານ-ການແຫ້ງໄໝ້ 等待形式审查

摘要

The present invention addresses the problem of providing a control system of a double-sided polishing device, a control device, and a method for producing a substrate with which it is possible to quickly control the flatness of a substrate with a high degree of precision by controlling polishing conditions. The present invention is a control system of a double-sided polishing device 10 that sandwiches a body W to be polished between an upper face plate 21 and a lower face plate 32 and that polishes a TOP surface 30a and a BOT surface 30b of the body W to be polished by causing the upper face plate and the lower face plate to rotate, wherein the control system is characterized in that: each of a TOP surface work amount PT (Ws) required in polishing of the TOP surface 30a, and a BOT surface work amount PB (Ws) required in polishing of the BOT surface 30b, are calculated; and polishing conditions are controlled so that the difference between the calculated TOP surface work amount PT and BOT surface work amount PB is kept within a prescribed range.

The present invention addresses the problem of providing a control system of a double-sided polishing device, a control device, and a method for producing a substrate with which it is possible to quickly control the flatness of a substrate with a high degree of precision by controlling polishing conditions. The present invention is a control system of a double-sided polishing device 10 that sandwiches a body W to be polished between an upper face plate 21 and a lower face plate 32 and that polishes a TOP surface 30a and a BOT surface 30b of the body W to be polished by causing the upper face plate and the lower face plate to rotate, wherein the control system is characterized in that: each of a TOP surface work amount PT (Ws) required in polishing of the TOP surface 30a, and a BOT surface work amount PB (Ws) required in polishing of the BOT surface 30b, are calculated; and polishing conditions are controlled so that the difference between the calculated TOP surface work amount PT and BOT surface work amount PB is kept within a prescribed range.

ແຫຼ່ງຂໍ້ມູນ, ບໍລິການ ແລະ ການປະຕິບັດຕາມກົດໝາຍ

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LaoBiz.com is a Laos business-information and market-research platform for global companies—helping users understand the Lao market, discover opportunities and find potential partners more efficiently. Commercial records are drawn mainly from official public registry systems maintained by Lao competent authorities—including MoIC’s NED (enterprise registration), BNED (business licences) and eBRS (business registration), MoF’s TaxRIS (tax registration), and related official public channels such as intellectual-property filings. LaoBiz does not create or alter registry facts; on top of those official public records we organise, standardise, translate, classify by industry and index for search so fragmented filings are easier to find, understand and use. We continuously watch official public-data changes and offer sync tools so users can check an enterprise’s latest public status.

LaoBiz.com is a Laos business-information and market-research platform for global companies—helping users understand the Lao market, discover opportunities and find potential partners more efficiently. Commercial records are drawn mainly from official public registry systems maintained by Lao competent authorities—including MoIC’s NED (enterprise registration), BNED (business licences) and eBRS (business registration), MoF’s TaxRIS (tax registration), and related official public channels such as intellectual-property filings. LaoBiz does not create or alter registry facts; on top of those official public records we organise, standardise, translate, classify by industry and index for search so fragmented filings are easier to find, understand and use. We continuously watch official public-data changes and offer sync tools so users can check an enterprise’s latest public status.

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Each LaoBiz.com company profile offers “Sync latest data”. Users can actively request verification for a specific enterprise; the page is then refreshed from what the public systems return. Because company registration, tax status and related public filings are maintained by different authorities, update timing may vary. For business decisions, legal documents, government approvals and other formal uses, please rely on the latest information and official documents issued by the competent authority.

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LaoBiz.com 是独立运营的商业信息服务平台，不属于任何政府机构、登记机关或官方代理机构。平台专注于老挝商业信息整理、企业查询、市场研究和商业数据应用服务，帮助用户完成企业背景查询、行业市场分析、供应链及合作伙伴筛选与投资前期研究。同时，平台可根据用户需求提供老挝市场相关的信息整理、商务咨询及企业服务支持。

LaoBiz.com is an independently operated business information platform and is not a government body, registry office or official agent. We focus on organising Lao commercial information and on company lookup, market research and data-application services—helping users with company background checks, industry analysis, supplier and partner screening, and early-stage investment research. We can also provide Lao-market information support, business advisory and related enterprise services based on user needs.

LaoBiz.com is an independently operated business information platform and is not a government body, registry office or official agent. We focus on organising Lao commercial information and on company lookup, market research and data-application services—helping users with company background checks, industry analysis, supplier and partner screening, and early-stage investment research. We can also provide Lao-market information support, business advisory and related enterprise services based on user needs.

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Rights in Lao government-published registry information and related data remain with the competent authorities. LaoBiz does not claim exclusive ownership of raw government data; we provide organisation, search, multilingual presentation and application of open commercial information. If a rights holder believes content should be corrected or adjusted, please contact us through the site—we will process verified requests.

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LaoBiz.com 由注册于中国香港特别行政区的运营主体提供技术及信息服务。平台服务涉及老挝公开商业信息及相关市场服务，并遵守适用法律法规及公开信息使用规则。

LaoBiz.com is provided by an operating entity registered in the Hong Kong Special Administrative Region of China. Our services involve Lao public commercial information and related market support, and we follow applicable laws and public-information use rules.

LaoBiz.com is provided by an operating entity registered in the Hong Kong Special Administrative Region of China. Our services involve Lao public commercial information and related market support, and we follow applicable laws and public-information use rules.

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